About: CVD Polymers for Devices and Device Fabrication

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An Entity of Type : schema:ScholarlyArticle, within Data Space : covidontheweb.inria.fr associated with source document(s)

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type	Academic Article research paper schema:ScholarlyArticle
isDefinedBy	Covid-on-the-Web dataset
title	CVD Polymers for Devices and Device Fabrication
Creator	Liu, A Wang, X Wang, Xiaoxue Kim, D Kim, Han »more»
source	Medline; PMC
abstract	Chemical vapor deposition (CVD) polymerization directly synthesizes organic thin films on a substrate from vapor phase reactants. Dielectric, semiconducting, electrically conducting, and ionically conducting CVD polymers have all been readily integrated into devices. The absence of solvent in the CVD process enables the growth of high‐purity layers and avoids the potential of dewetting phenomena, which lead to pinhole defects. By limiting contaminants and defects, ultrathin (<10 nm) CVD polymeric device layers have been fabricated in multiple laboratories. The CVD method is particularly suitable for synthesizing insoluble conductive polymers, layers with high densities of organic functional groups, and robust crosslinked networks. Additionally, CVD polymers are prized for the ability to conformally cover rough surfaces, like those of paper and textile substrates, as well as the complex geometries of micro‐ and nanostructured devices. By employing low processing temperatures, CVD polymerization avoids damaging substrates and underlying device layers. This report discusses the mechanisms of the major CVD polymerization techniques and the recent progress of their applications in devices and device fabrication, with emphasis on initiated CVD (iCVD) and oxidative CVD (oCVD) polymerization.
has issue date	2016-12-29(xsd:dateTime)
bibo:doi	10.1002/adma.201604606
bibo:pmid	28032923
has license	no-cc
sha1sum (hex)	06b8e827d718d809f2dce3e9c2bb86bd5c964dcb
schema:url	https://doi.org/10.1002/adma.201604606
resource representing a document's title	CVD Polymers for Devices and Device Fabrication
has PubMed Central identifier	PMC7161753
has PubMed identifier	28032923
schema:publication	Adv Mater
resource representing a document's body	covid:06b8e827d718d809f2dce3e9c2bb86bd5c964dcb#body_text
is schema:about of	named entity 'PERMEATION' named entity 'APPLICATIONS' named entity 'STEP' named entity 'BIOMASS' named entity 'CHLORIDE' »more»

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